Application of magnetic fields in industrial growth of silicon single crystals
authored by
W. von Ammon,
Y. Gelfgat,
L. Gorbunov,
A. Muižnieks,
Y. Makarov,
J. Virbulis,
G. Müller,
A. Mühlbauer
Organisation(s)
Institute of Electrothermic Process Engineering
External Organisation(s)
Siltronic AG
University of Latvia
Semiconductor Technology Research Inc
PAIC Ltd
Fraunhofer Institute of Integrated Systems and Device Technology (IISB)
Type
Article
Journal
Magnetohydrodynamics
Volume
42
Pages
427-444
No. of pages
18
ISSN
0024-998X
Publication date
2006
Publication status
Published
Peer reviewed
Yes
ASJC Scopus subject areas
Physics and Astronomy(all),
Electrical and Electronic Engineering
