Numerical model of turbulent CZ melt flow in the presence of AC and CUSP magnetic fields and its verification in a laboratory facility

authored by
Th Wetzel, A. Muiznieks, A. Mühlbauer, Y. Gelfgat, L. Gorbunov, J. Virbulis, E. Tomzig, W. V. Ammon
Abstract

The paper describes a numerical simulation tool for heat and mass transfer processes in large diameter CZ crucibles under the influence of several non-rotating AC and CUSP magnetic fields. Such fields are expected to provide an additional means to influence the melt behaviour, particularly in the industrial growth of large diameter silicon crystals. The simulation tool is based on axisymmetric 2D models for the AC and CUSP magnetic fields in the whole CZ facility and turbulent hydrodynamics, temperature and mass transport in the melt under the influence of the electromagnetic fields. The simulation tool is verified by comparisons to experimental results from a laboratory CZ setup with eutectics InGaSn model melt.

Organisation(s)
Institute of Electrothermic Process Engineering
External Organisation(s)
University of Latvia
Siltronic AG
Type
Conference article
Journal
Journal of crystal growth
Volume
230
Pages
81-91
No. of pages
11
ISSN
0022-0248
Publication date
08.2001
Publication status
Published
Peer reviewed
Yes
ASJC Scopus subject areas
Condensed Matter Physics, Inorganic Chemistry, Materials Chemistry
Sustainable Development Goals
SDG 9 - Industry, Innovation, and Infrastructure
Electronic version(s)
https://doi.org/10.1016/S0022-0248(01)01316-1 (Access: Closed)