Numerical model of turbulent CZ melt flow in the presence of AC and CUSP magnetic fields and its verification in a laboratory facility

verfasst von

Th Wetzel, A. Muiznieks, A. Mühlbauer, Y. Gelfgat, L. Gorbunov, J. Virbulis, E. Tomzig, W. V. Ammon

Abstract

The paper describes a numerical simulation tool for heat and mass transfer processes in large diameter CZ crucibles under the influence of several non-rotating AC and CUSP magnetic fields. Such fields are expected to provide an additional means to influence the melt behaviour, particularly in the industrial growth of large diameter silicon crystals. The simulation tool is based on axisymmetric 2D models for the AC and CUSP magnetic fields in the whole CZ facility and turbulent hydrodynamics, temperature and mass transport in the melt under the influence of the electromagnetic fields. The simulation tool is verified by comparisons to experimental results from a laboratory CZ setup with eutectics InGaSn model melt.

Organisationseinheit(en)

Institut für Elektroprozesstechnik

Externe Organisation(en)

University of Latvia
Siltronic AG

Typ

Konferenzaufsatz in Fachzeitschrift

Journal

Journal of crystal growth

Band

230

Seiten

81-91

Anzahl der Seiten

11

ISSN

0022-0248

Publikationsdatum

08.2001

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Physik der kondensierten Materie, Anorganische Chemie, Werkstoffchemie

Ziele für nachhaltige Entwicklung

SDG 9 – Industrie, Innovation und Infrastruktur

Elektronische Version(en)

https://doi.org/10.1016/S0022-0248(01)01316-1 (Zugang: Geschlossen)