Wet-Chemically Grown Interfacial Oxide for Passivating Contacts Fabricated With an Industrial Inline Processing System
- verfasst von
- Byungsul Min, Philipp Noack, Bianca Wattenberg, Torsten Dippell, Henning Schulte-Huxel, Robby Peibst, Rolf Brendel
- Abstract
This article presents for the first time the application of wet-chemical interfacial oxide from an industrial inline processing system for poly-Si-based passivating contacts. An excellent passivation quality is achieved by creating an interfacial oxide with a very short exposure time of 90 s in ozonized water and by adjusting the annealing temperature in a tube furnace, resulting in surface recombination current densities of 4 fA/cm
2 and 1.2 fA/cm
2 before and after a hydrogenation step, respectively. Detailed electrical characterization reveals the interplay of in-diffusion of P into the wafer and hydrogenation step. Our investigation shows that the optimum annealing temperature can differ before and after the hydrogenation step. The developed wet-chemical interfacial oxide is successfully implemented in back junction solar cells on large-area gallium-doped p-type silicon wafers (156.75 × 156.75 mm
2) featuring a phosphorus-doped poly-Si-based passivating contact at the rear side. The best cell has an efficiency of 23.6% and an open-circuit voltage of 719 mV, independently confirmed by ISFH CalTeC in Germany. Our cost calculation shows a saving of up to 17.2% in capital expenditure, 5.2% p.a. in operating expense, and 9.0% in the footprint if the interfacial oxide is formed by an inline wet-chemical processing system instead of a plasma chamber.
- Organisationseinheit(en)
-
Institut für Festkörperphysik
- Externe Organisation(en)
-
Institut für Solarenergieforschung GmbH (ISFH)
Singulus Technologies AG
- Typ
- Artikel
- Journal
- IEEE Journal of Photovoltaics
- Band
- 14
- Seiten
- 233-239
- Anzahl der Seiten
- 7
- ISSN
- 2156-3381
- Publikationsdatum
- 03.2024
- Publikationsstatus
- Veröffentlicht
- Peer-reviewed
- Ja
- ASJC Scopus Sachgebiete
- Elektronische, optische und magnetische Materialien, Physik der kondensierten Materie, Elektrotechnik und Elektronik
- Ziele für nachhaltige Entwicklung
- SDG 7 – Erschwingliche und saubere Energie
- Elektronische Version(en)
-
https://doi.org/10.1109/JPHOTOV.2024.3352836 (Zugang:
Geschlossen)
